Aluminium Mirror Inline Magnetron Sputtering Line e etselitsoe tlhahiso e phahameng ea sepheo sa ho etsa seipone sa khalase.E le ho koahela khalase e kholoanyane le ho hlokomela phanele ea khalase e senyehang, haholo-holo bakeng sa maqephe a maholo a boholo, hangata re etsa mofuta o otlolohileng oa mohala oa sputtering.Ke mohala o tsoelang pele oa ho roala ka magnetron, o nang le kamore ea ho pompa e ka pele le e ka morao, 'me ka mor'a kamore ea phetoho, pele le ka mor'a kamore e ntle ea ho pompa, kamore ea buffer, kamore ea ho roala mebala.
Sepheo sa d esign: cylindrical magnetron sputtering cathodes kapa/le planar cathodes.
Mohloli oa matla: phepelo ea motlakase e nang le matla a phahameng a DC kapa MF magnetron sputtering
Sistimi ea ho khanna: koloi ea roller, e feto-fetoha khafetsa, sistimi ea ho bula lemati la kamore ea induction.
Sistimi ea vacuum: pompo ea phallo (kapa pompo ea molek'hule ea turbo) + pompo ea metso + pompo ea mochini
2. Likamore tse nang le li-vacuum tse ngata le moralo oa likamore tse ngata tsa sputtering li fumaneha
3. Mohala oa taolo ea makenete o otlolohileng o na le sebopeho se le seng le se habeli;khalase ea ho hloekisa habeli, ho roala, ho lemoha, ho penta, ho omisa, ho pholile ho ka phethoa ka nako e le 'ngoe
4. Mohala oa ho roala o sebelisa PLC bakeng sa taolo eohle ea ts'ebetso mme o na le skrine ea mebala ho bonts'a data ea ts'ebetso ea ho roala.
Lera la ho roala: Titanium, Chrome, Stainless Steel, Aluminium, Silver, Copper, joalo-joalo.
Motsoako: TiN, TiO2, joalo-joalo.
Lera botenya: 5-100nm
Phetiso: 8-40% ho 380-780 nm wavelengths
Mocheso oa ho beha: mocheso oa kamore
Khatello e phahameng ka mor'a pompo ea lihora tse 8:
Kamore ea senotlolo sa ho kena le kamore ea senotlolo sa vacuum: 5 × 10-1 Pa kapa ka tlase
Buffer Chamber 1 : 3×10-3 Pa kapa ka tlase
Sputtering Chamber: 2×10-3 Pa kapa ka tlase
Buffer Chamber 2 : 3×10-3 Pa kapa ka tlase
Tsoa ka kamoreng ea senotlolo & kamore ea senotlolo sa vacuum: 5 × 10-1 Pa kapa ka tlase