Vacuum deposition magnetron sputtering system ke mofuta oa lisebelisoa tsa vacuum tse ka sebelisetsoang ho sebelisa likarolo tse tšesaane tsa ho roala filimi holim'a lisebelisoa tse fapaneng tse tala tse nang le lirafshoa tsa tšepe kapa tse sebetsang.
Lisebelisoa tse sebetsang: khalase, polasetiki, tšepe le lisebelisoa tse ling tsa tšepe kapa tse seng tsa tšepe (li ka kenngoa ka thepa e sa sebetseng)
Liindasteri tse sebetsang: metallization ea polasetiki, seipone sa aluminium ea khalase, seipone sa silevera, khalase ea ITO, khalase ea Low-E, mochini o rokang oa tableware o lahliloeng, tube ea pokello ea letsatsi, ho roala lisebelisoa, filimi e khabisitsoeng ea mohala oa mohala, lithaelese tsa ceramic tse khabisitsoeng, joalo-joalo.
Mofuta oa filimi: filimi e fapaneng ea tšepe kapa khalase, filimi ea ceramic
Thepa ea boholo: ho ea ka litlhoko tsa bareki, re ka rala boholo bo fapaneng ba tlhahiso ea kamore e le 'ngoe monyako, kamore e le' ngoe ea kamore e le 'ngoe, lisebelisoa tse peli tsa kamore le mohala o tsoelang pele oa tlhahiso.
Sistimi ea taolo: Sistimi ea taolo ea PLC (e ikemetseng, ea boikhethelo)
Phepelo ea motlakase: matla a DC, matla a MF, matla a pulse DC
'Mala oa lisebelisoa: o fumaneha bakeng sa bareki ho o etsa
Potoloho ea ho roala:> Metsotso e 10 (ho ea ka mefuta e fapaneng ea ts'ebetso, potoloho ea tlhahiso ea ho roala e fapane)
Basebelisi: 2-3Tšebeliso ea Matla ka hora:> 20 kW
Boitsebiso: tšepe ea carbon kapa tšepe e sa hloekang
Khase ea ts'ebetso: argon (ho itšetlehile ka ts'ebetso, naetrojene, acetylene, oksijene, joalo-joalo e ka sebelisoa)
Mesebetsi ea ts'ehetso: moea o hatelitsoeng, metsi a pholileng, ontong, khase ea ts'ebetso, lisebelisoa tse lebisitsoeng
Nako e telele ea bophelo
Melemo ea ho roala ho sebelisoa ke theknoloji ea magnetron sputtering:
Mebala e mengata e khanyang, ea tšepe
Tšireletso e babatsehang ea mongoapo
Mekhoa e metle ea tikoloho
Theknoloji ea magnetron sputtering e bohareng e sebelisoa haholo ho koahela vacuum bakeng sa merero ea ho khabisa.Re ka sebelisa theknoloji ena ea sputtering ho etsa lifilimi tse ntle tse khabisitsoeng.Lisebelisoa tsa ho roala hangata ke tšepe hobane 'mala o hlahisoang ke vacuum coating o tsoa ho sputtering e sebetsang.Ts'ebetsong ena, magnetron sputtering cathode e hlahisa mocheso o itseng, e leng se bakang ho senyeha ha thepa e tala ea mocheso.